Ruthenium Sputtering Targets | Ru Targets

Ruthenium, together with rhodium, palladium, osmium, iridium, and platinum form a group of elements referred to as the platinum group metals (PGM). Ruthenium is a hard, white metal. It does not tarnish at room temperatures, but oxidises in air at about 800°C. The metal is not attacked by hot or cold acids or aqua regia, but when potassium chlorate is added to the solution, it oxidises explosively. It dissolved in molten alkalis.

 

Ruthenium Sputtering Target——Ru Target

Purity 99.95%, 99.99%
Shape Discs, Plate, Step, Rectangle, Sheet, Tube, Custom-Made
Size Discs, Plate ( Diameter ≤300mm, Thickness ≥1mm)
Rectangle, Sheet, Step (Length ≤1000mm, Width ≤300mm, Thickness ≥1mm)
Column, Tube ( Diameter< 300mm, Thickness >2mm ), Custom-Made
Application

 

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Ruthenium, together with rhodium, palladium, osmium, iridium, and platinum form a group of elements referred to as the platinum group metals (PGM). Ruthenium is a hard, white metal. It does not tarnish at room temperatures, but oxidises in air at about 800°C. The metal is not attacked by hot or cold acids or aqua regia, but when potassium chlorate is added to the solution, it oxidises explosively. It dissolved in molten alkalis.

 

Ruthenium Sputtering Target——Ru Target

Purity 99.95%, 99.99%
Shape Discs, Plate, Step, Rectangle, Sheet, Tube, Custom-Made
Size iscs, Plate ( Diameter ≤300mm, Thickness ≥1mm)
Rectangle, Sheet, Step (Length ≤1000mm, Width ≤300mm, Thickness ≥1mm)
Column, Tube ( Diameter< 300mm, Thickness >2mm ), Custom-Made
Application

 

Send Inquiry